Advanced Nano- and Piezoelectric Materials and Their by Ivan A. Parinov PDF

By Ivan A. Parinov

ISBN-10: 1633212394

ISBN-13: 9781633212398

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Furthermore, we could observe the dependence of the oxide thickness on the annealing time between cycles of oxidation. It is assumed that a very rapid growth of the oxide (see Figure 2, curve 4) is related to the stress relaxation and perhaps with change of the charge states that affect the film growth rate. As it is known, thin oxide under the conditions of thermal oxidation grows much faster than it is described by Deal-Grove model [33]. So, for the theoretical justification of the oxide growth kinetics, a number of models based on bulk diffusion of charged particles or neutral pairs as well as on electron tunneling effects, building-up an electron cloud layer, generating elastic stresses on the oxide structure changing, has been developed [30, 31, 34  36].

38 V. V. Polyakov Figure 10. Dependence of C/Cox on gate voltage for Si-face capacitor on p-type SiC. 00126 cm2 [59]. Figure 11. Dependence of C/Cox on gate voltage for C-face capacitor on p-type SiC. 00126 cm2 [59]. Figure 12. Oxide thickness under various partial pressures of water vapor. Oxidation time is 5 hours: 1 – theoretical curve, 2 – experimental curve [62]. Development and Study of Silicon Dioxide Nanostructured Films … 39 Table 2. 3 49  52 32 - The measurements of volt-farad characteristics were performed in the dark, at room temperature and a frequency of 1 MHz.

Polyakov Figure 10. Dependence of C/Cox on gate voltage for Si-face capacitor on p-type SiC. 00126 cm2 [59]. Figure 11. Dependence of C/Cox on gate voltage for C-face capacitor on p-type SiC. 00126 cm2 [59]. Figure 12. Oxide thickness under various partial pressures of water vapor. Oxidation time is 5 hours: 1 – theoretical curve, 2 – experimental curve [62]. Development and Study of Silicon Dioxide Nanostructured Films … 39 Table 2. 3 49  52 32 - The measurements of volt-farad characteristics were performed in the dark, at room temperature and a frequency of 1 MHz.

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Advanced Nano- and Piezoelectric Materials and Their Applications by Ivan A. Parinov


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